针对常规弹药制导化应用中对大动态范围变化加速度参数测试的需求,以及空间尺寸的限制,采用多个不同量程加速度计进行测量所带来的极大不便和误差问题。文中设计了一种具有10g、100g、500g和10000g四种量程的硅微压阻式复合量程加速度计,并对其作了静、动力学仿真分析,在此基础上对所加工和封装好的复合量程加速度计进行了静、动态特性标定,标定结果表明该复合量程加速度计具有良好的静、动态特性,可以完成四个覆盖高低量程加速度值的测量。

A single-range accelerometer can not meet with the requirements of some special working environments, in which require testing the acceleration parameters ranged from several g to thousands of g. On the other hand, many measurement errors and inconvenience will be produced due to the spatial and mounting limitation from the usage of several accelerometers. To solve the above-mentioned problems, a multi-ranged micro accelerometer containing four accelerometer units (10g, 100g, 500g, and 10000g) was introduced in the present works. The structural design and static/dynamic simulation of the multi-ranged micro accelerometer were also elaborated, and the static and dynamic characteristics of the encapsulated multi-ranged micro accelerometer were calibrated. The calibration results showed that the multi-ranged micro accelerometer displayed good static and dynamic characteristics, and can be used for the measurement of the high low range acceleration.