[an error occurred while processing this directive] [an error occurred while processing this directive] [an error occurred while processing this directive]
[an error occurred while processing this directive]

弹箭与制导学报 >

2023 , Vol. 43 >Issue 4: 1 - 14

DOI: https://doi.org/10.15892/j.cnki.djzdxb.2023.04.001

微光学陀螺发展研究

  • 张辉 ,
  • 谭鹏立 ,
  • 蒋军彪 ,
  • 李晓 ,
  • 陈瑶 ,
  • 梁铭珊
展开
  • 西安现代控制技术研究所,陕西 西安 710065

张辉(1983—),男,高级工程师,硕士,研究方向:光学陀螺及应用。

收稿日期: 2022-10-27

  网络出版日期: 2025-02-07

基金资助

国防科工局技术基础科研项目(JSJL2020203A002)

收起

Development Review of Micro Optic Gyroscope

  • ZHANG Hui ,
  • TAN Pengli ,
  • JIANG Junbiao ,
  • LI Xiao ,
  • CHEN Yao ,
  • LIANG Mingshan
Expand
  • Xi'an Mordern Control Technology Research Institute,Xi'an 710065,Shaanxi,China

Received date: 2022-10-27

  Online published: 2025-02-07

Fold

摘要

微光学陀螺(micro optic gyroscope,MOG)是一种基于波导环和Sagnac效应的小型化、集成化的新型角速度传感器,因其在综合性能上的潜在优势,有望在智能弹药、无人飞行器和水下无人运载器等小型平台上获得广泛应用。文中简述了3类MOG的基本原理;详细介绍了国内外研究机构在3类MOG技术方案,各光波导、集成光学器件等关键组件的方案及其制造工艺技术等方面取得的进展;展望了MOG的发展前景。

关键词： 微光学陀螺; 波导环; 干涉型微光学陀螺; 谐振型微光学陀螺; 布里渊微光学陀螺

本文引用格式

张辉 , 谭鹏立 , 蒋军彪 , 李晓 , 陈瑶 , 梁铭珊 . 微光学陀螺发展研究[J]. 弹箭与制导学报, 2023 , 43(4) : 1 -14 . DOI: 10.15892/j.cnki.djzdxb.2023.04.001

Abstract

Micro Optic Gyroscope is a new type of miniature and integrated angular velocity sensor based on waveguide rings and Sagnac effect. Because of their potential advantages in comprehensive performance, MOGs will be widely used in smart ammunition,unmanned air and underwater vehicles and other small platforms. This paper briefly describes the basic principles of three types MOGs. The progress made by domestic and foreign research institutions in technical schemes of three type MOGs, the schemes of key components such as various optical waveguides and integrated optical devices and their manufacturing technology are introduced in detail. The development prospect of MOG is prospected.

Key words： micro optic gyroscope; waveguide coil; interferometric micro optic gyroscope; resonant micro optic gyroscope; brillouin micro optic gyroscope

[an error occurred while processing this directive]

参考文献

原文顺序 | 文献年度倒序 | 文中引用次数倒序
[1]
LIU D N, LI H, WANG X, et al. Interferometric optical gyroscope based on a integrated silica waveguide coil with low loss[J]. Optics Express, 2020, 28(10): 15718-15729.

[2]
WU B B, YU Y, ZHANG X L. Mode-assisted silicon integrated interferometric optical gyroscope[J]. Scientific Reports, 2019, 9: 12946.

DOI PMID

[3]
GUNDAVARAPU S, BELT M, HUFFMAN T A, et al. Interferometric optical gyroscope based on an integrated ultra low loss Si3N4 waveguide coil[J]. Journal of Lightwave Technology, 2018, 36(4): 1185-1191.

[4]
KHIAL P P, WHITE A D, HAJIMIRI A. Nanophotonic optical gyroscope with reciprocal sensitivity enhancement[J]. Nature Photonics, 2018, 12(11): 671-675.

DOI

[5]
LIU D N, FENG L S, JIA Y Z, et al. Heterogeneous integration of LN and Si3N4 waveguides using an optical interlayer coupler[J]. Optics Communications, 2019, 436: 1-6.

[6]
孙道鑫, 张东亮, 毕付, 等. 应用于集成光学陀螺敏感单元的硅基微环谐振腔[J]. 激光与光电子学进展, 2022, 59(15): 1513001.

SUN D X, ZHANG D L, FU B, et al. Application of silicon-based microring resonant cavity in integrated optical gyroscope sensitive unit[J]. Laser & Optoelectronics Progress, 2022, 59(15): 1513001.

[7]
ZHANG L, JIE L L, ZHANG M, et al. Ultrahigh-Q silicon racetrack resonators[J]. Photonics Research, 2020, 8(5): 684-689.

[8]
CATERINA C, AGOSTINO D D, CARNICELLA G, et al. A high-Q InP resonant angular velocity sensor for a monolithically integrated optical gyroscope[J]. IEEE Photonics Journal, 2016, 8(1): 6800418.

[9]
FILATOVA Y V, KUKAEV A S, NIKOLAEVA N A, et al. Method for measuring angular velocity using a passive ring resonator and a Mach-Zehnder modulator[J]. Optical Engineering, 2020, 59(7): 7416-7426.

[10]
NELSON K D, PUCKETT M W, WU J F. A ring-laser gyro based on stimulated Brillouin scattering in silicon nitride waveguides[C] // IEEE. Proceedings of 2020 IEEE Research and Applications of Photonics in Defense Conference (RAPID). New York: IEEE, 2020: 1131-1134.

[11]
KERRY V, LAI Y H, SUH M G, et al. A brillouin gyroscope using chip-integrable high-Q optical cavities[J]. Advanced Photonics Congress, 2018: 3170-3179.

[12]
LAI Y H, SUH M G, LU Y K, et al. Earth rotation measured by a chip-scale ring laser gyroscope[J]. Nature Photonics, 2020, 14: 345-349.

[13]
KERRY V, LAI Y H, SUH M G, et al. A chip-based brillouin laser gyroscope with earth-rotation-rate sensitivity[J]. Conference on Lasers and Electro-Optics, 2021.

[14]
LIANG W, VLADIMIR I, DANNY E, et al. Whispering gallery mode optical gyroscope[C]// IEEE. Proceedings of the IEEE International Symposium on Inertial Sensors & Systems. New York: IEEE, 2016: 2163-2171.

[15]
LIU N, NIU Y X, FENG L SH, et al. Suppression of backscattering induced noise by the sideband locking technique in a resonant fiber optic gyroscope[J]. Chinese Optics Letters, 2018, 16(1): 7455-7461.

[16]
于怀勇, 张春熹, 冯丽爽, 等. 谐振式硅基集成光学陀螺的偏振噪声建模与分析[J]. 红外与激光工程, 2012, 41(5): 1287-1293.

YU H Y, ZHANG C X, FENG L S, et al. Modeling of polarization noise in silicon integrated optical resonance gyroscope and performance analysis[J]. Infrared and Laser Engineering, 2021, 41(5): 1287-1293.

[17]
HE Y M, YANG F H, YAN W, et al. Asymmetry analysis of the resonance curve in resonant integrated optical gyroscopes[J]. Sensors, 2019, 19: 3305-3316.

[18]
LI H, NI P R, WANG Q W, et al. Analysis and optimization of dynamic performance for resonant integrated optical gyroscope[J]. Journal of Lightwave Technology, 2021, 39(6): 1858-1866.

[19]
张燕生, 张春熹, 蒋军彪, 等. 光电子学与光学陀螺仪[M]. 北京: 清华大学出版社, 2017.

ZHANG C S, ZHANG C X, JIANG J B, et al. Optoelectronics and optical gyroscopes[M]. Beijing: Tsinghua University Publishing House Co., Ltd., 2017.

[20]
TRAN M A, KOMLJENOVIC T, HULME J C, et al. Integrated optical driver for interferometric optical gyroscopes[J]. Optics Express, 2017, 25(4): 3826-3831.

DOI PMID

[21]
GILLES F, ALEXIA R, SYLAIN S, FABIEN B. Analysis of the design of a passive resonant miniature optical gyroscope based on integrated optics technologies[J]. Optical Engineering, 2017, 56(10): 107109.

[22]
HE Y M, FANG F H, YAN W, et al. Phase modulation techniques for suppressing backscattering noise in resonator integrated optic gyroscopes[J]. Chinese Optics, 2019, 12(6): 1403-1417.

[23]
唐杰. 谐振式聚合物集成光学陀螺的基础研究[D]. 南京: 东南大学, 2019.

TANG J. Research on polymer resonant integrated optic gyroscope[D]. Nanjing: Southeast University, 2019.

[24]
SUH M G, LAI Y H, KERRY J V. Microresonator brillouin laser gyroscope with earth-rotation-rate sensitivity[J]. Optical Fiber Communication, 2021(1): 6-11.

[25]
SAYYID A H, PARHAM P. Integrated optical gyroscope with noise cancellation: 201880032107.0[P]. 2018-05-30.

[26]
LIU K K, JIN N J, DANIEL J B, et al. 720 million quality factor integrated all-waveguide photonic resonator[J]. Nature Communications, 2021: 1221-1228.

[27]
闫树斌, 马可贞, 李明慧, 等. 面向陀螺应用的硅基大尺寸楔角型谐振腔[J]. 红外与激光工程. 2015, 44(2): 747-751.

YAN S B, MA K Z, LI M H, et al. Large dimension wedge-resonator on silicon chip for gyro application[J]. Infrared and Laser Engineering, 2015, 44(2): 747-751.

[28]
杨柳, 庄永勇, 魏晓勇, 等. 回音壁模式光学谐振腔研究进展[J]. 大学物理, 2021, 40(5): 41-54.

YANG L, ZHUAGN Y Y, WEI X Y, et al. Progress of whispering gallery mode resonator[J]. College Physics, 2021, 40(2): 41-54.

[29]
CHANG L, PFEIFFER M H P, NICOLAS V, et al. Heterogeneous integration of lithium niobate and silicon nitride waveguides for wafer-scale photonic integrated circuits on silicon[J]. Optics Letters, 2017, 42(4): 803-806.

DOI PMID

[30]
史云玲, 李萍, 王宇, 等. 一种二氧化硅波导与铌酸锂薄膜垂直耦合的谐振式集成光学陀螺: 201611127051.6[P]. 2016-12-09.

SHI Y L, LI P, WANG Y, et al. A resonant integrated optical gyroscope with a silicon dioxide waveguide vertically coupled to a lithium niobate film: 201611127051.6[P]. 2016-12-09.

[31]
尚克军, 雷明, 向强, 等. 一种基于集成光学芯片的微小型光纤陀螺[J]. 中国惯性技术学报, 2020, 28(5): 650-653.

SHANG K J, LEI M, XIANG Q, et al. An integrated optical chip based miniature fiber optic gyroscope[J]. Journal of Chinese Inertial Technology, 2020, 28(5): 650-653.

[32]
WANG L M, HALSTEAD D R, MONTE T D, et al. Low-cost, high-end tactical-grade fiber optic gyroscope based on photonic integrated circuit[C]// IEEE. Proceedings of the IEEE International Symposium on Inertial Sensors and Systems. New York: IEEE, 2019: 1-2.

[33]
SHANG K J, LEI M, XIANG Q, et al. Tactical-grade interferometric fiber optic gyroscope based on an integrated optical chip[J]. Optics Communications, 2021, 485: 126729.

[34]
TRAN M A, HUANG D N, TIN K, et. al. Ultra-low-loss silicon waveguides for heterogeneously integrated silicon/III-V photonics[J]. Applied Sciences, 2018, 8, 1139-1145.

[35]
李慧, 温琛, 冯昌坤, 等. 谐振式集成光学陀螺抑制背向反射误差的频谱分离方法: 202110860706.5[P]. 2021-07-28.

LI H, WEN C, FENG C K, et al. Spectral separation method for suppressing back-reflection error of resonator integrated optical gyroscope: 202110860706.5[P]. 2021-07-28.

[36]
WU C B, LIN Y, JIN X J, et al. Synchronous in-phase and quadrature demodulation technique for resonant micro-optic gyroscope[J]. Applied Optics, 2019, 58(18): 5050-5056.

[37]
ZHANG J J, MA H L, LI H ZH, et al. Single-polarization fiber-pigtailed high-finesse silica waveguide ring resonator for a resonant micro-optic gyroscope[J]. Optics Letters. 2017, 42(18): 3658-3661.

DOI PMID

[38]
MA H L, LI X H, ZHANG G H, et al. Reduction of optical Kerr-effect induced error in a resonant micro-optic gyro by light-intensity feedback technique[J]. Applied Optics, 2014, 53(16): 3465-3472.

[39]
LI J, SUH M G, KERRY V. Microresonator brillouin gyroscope[J]. Optica, 2017, 4(3): 346-348.

[40]
MA H L, ZHANG J J, WANG L L, et al. Development and evaluation of optical passive resonant gyroscopes[J]. Journal of Lightwave Technology, 2017, 35(16): 3546-3554.

[41]
杨添舒, 费瑶, 李兆峰, 等. 干涉型与谐振型集成光学陀螺的比较[J]. 激光与光电子学进展, 2016, 53(8): 97-103.

YANG T S, FEI Y, LI Z F, et al. Comparison between interferometric and resonant integrated optic gyroscopes[J]. Laser & Optoelectronics Progress, 2016, 53(8): 97-103.

[42]
WU L, WANG H, YANG Q, et al. Greater than one billion q factor for on-chip microresonators[J]. Optic Letters, 2020, 45: 5129-5131.

[43]
PUCKETT M W, LIU K, CHAUHAN N, et al. 422 million intrinsic quality factor planar integrated all-waveguide resonator with sub-mhz linewidth[J]. Nature, 2021, 578: 1-8.

[44]
WANG H, WU L, YUAN Z H, et al. Towards milli-hertz laser frequency noise on a chip[C] // IEEE. Proceedings of the 2021 Conference on Lasers and Electro-Optics(CLEO). New York: IEEE, 2021: 3151-3162.

[45]
LAI Y H, LU Y K, SUH M G, et al. Observation of the exceptional-point-enhanced sagnac effect[J]. Nature, 2019, 576: 65-69.

[46]
WANG H, LAI Y H, YUAN Z H, et al. Petermann-factor sensitivity limit near an exceptional point in a brillouin ring laser gyroscope[J]. Nature, 2020, 577: 921-927.

[47]
LIU L, WANG R X, ZHAO X Y, et al. Hogeneously integrated quantum-dot emitters efficiently driven by a quasi-BIC-supporting dielectric nanoresonator[J]. Photonics Research, 2022, 10(8): 1971-1982.

Options
文章导航

/

〈 〉

[an error occurred while processing this directive]