某MEMS惯性传感器组件在130 mm弹载试验后出现无输出功能失效,经电性能测试、工艺结构分析、有限元力学仿真等分析。组件的失效主要是由于内部主控板受力不均出现了翘曲变形、断裂,最终导致组件失效。根据失效机理,优化了主控板的版图及灌封工艺方法,使主控板的受力均匀性和一致性得到了控制,从而有效解决了失效问题。

After 130 mm missile-borne test,the output function of an inertial sensor component failed. The failure was analyzed by means of electrical performance test, technical structure analysis and finite element mechanical simulation. The results show that the defeat of the components is primarily caused by the warping deformation and fracture of the internal main control plate, which eventually leads to the failure of the component. According to the failure mechanism, the layout and filling process of the main control board were optimized, so that the uniformity and consistency of the force on the main control board were controlled, and the invalidation problem was effectively solved.