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弹箭与制导学报 >

2026 , Vol. 46 >Issue 1: 77 - 87

DOI: https://doi.org/10.15892/j.cnki.djzdxb.2026.01.008

石英挠性加速度计量程与二次项优化设计

  • 张宇航 ,
  • 李思源 , * ,
  • 王文一 ,
  • 刘嘉威
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  • 西安航天精密机电研究所,陕西 西安 710000
*

收稿日期: 2025-12-15

  网络出版日期: 2026-03-09

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Optimization Design of the Range and Quadratic Term of Quartz Flexural Accelerometer

  • ZHANG Yuhang ,
  • LI Siyuan , * ,
  • WANG Wenyi ,
  • LIU Jiawei
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  • Xi'an Aerospace Precision Electromechanical Institute, Xi'an 710000, Shaanxi, China

Received date: 2025-12-15

  Online published: 2026-03-09

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摘要

针对惯性导航系统对石英挠性加速度计大量程、动态飞行精度要求高的应用需求,提出新的石英挠性加速度计摆组件结构,提高加速度计的量程与二次项系数。对设计的摆组件进行数学建模,得到设计加速度计的标度因数,根据伺服电路的负载能力,理论计算得到加速度计的设计量程。分析加速度计二次项系数的优化方法,给出二次项系数的优化方案。通过数值仿真,得到设计摆组件的挠度与满量程下的应力满足设计要求。试验结果表明研制的石英挠性加速度计量程达到110g,二次项系数优于5μg/g2,提高了石英挠性加速度计在惯导系统的动态应用能力。

关键词： 飞行精度; 摆组件; 大量程; 二次项系数; 惯导系统

本文引用格式

张宇航 , 李思源 , 王文一 , 刘嘉威 . 石英挠性加速度计量程与二次项优化设计[J]. 弹箭与制导学报, 2026 , 46(1) : 77 -87 . DOI: 10.15892/j.cnki.djzdxb.2026.01.008

Abstract

In response to the application requirements of inertial navigation systems for quartz flexible accelerometers with a large range and high dynamic flight accuracy, a new structure for the pendulum assembly of quartz flexible accelerometer is proposed to enhance the range and second-order coefficient of accelerometer. A mathematical model of the designed pendulum assembly is established to derive the scale factor of the designed accelerometer. The design range of accelerometer is theoretically calculated based on the load capacity of servo circuit. The optimization method for the second-order coefficient of the accelerometer is analyzed, and an optimization scheme for the second-order coefficient is provided. Through numerical simulations, it is verified that the deflection and stress of the designed pendulum assembly under full-scale conditions meet the design requirements. Experimental results show that the quartz flexible accelerometer achieves a range of 110g and a second-order coefficient better than 5 μg/g2, thereby improving the dynamic application capability of quartz flexible accelerometers in inertial navigation systems.

Key words： flight accuracy; pendulum assembly; large range; second-order coefficient; inertial navigation system

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参考文献

原文顺序 | 文献年度倒序 | 文中引用次数倒序
[1]
COMI C, CORIGLIANO A, LANGFELDER G, et al. Sensitivity and temperature behavior of a novel z-axis differential resonant micro accelerometer[J]. Journal of Micromechanics and Microengineering, 2016, 26(3):035006.

DOI

[2]
贾继超, 王萌, 刘鑫, 等. 一种石英挠性加速度计非线性误差系统级标定方法[J]. 中国惯性技术学报, 2023, 31(1):67-71.

JIA J C, WANG M, LIU X, et al. A system-level calibration method for nonlinear error of quartz flexible accelerometer[J]. Journal of Chinese Inertial Technology, 2023, 31(1):67-71.

[3]
彭志高, 王勇, 张占伟, 等. 石英挠性加速度计量程提高技术研究[J]. 压电与声光, 2024, 46(4):603-608.

PENG Z G, WANG Y, ZHANG Z W, et al. Research on range expansion technology of quartz flexible accelerometer[J]. Piezoelectrics & Acoustooptics, 2024, 46 (4):603-608.

[4]
WON S P, GOLNARAGHI F A. Triaxial accelerometer calibration method using a mathematical model[J]. Instrumentation and Measurement, 2015, 59(8):2144-2153.

DOI

[5]
于丰源, 常欢, 邢冲, 等. 石英挠性加速度计标度因数温度系数补偿技术研究[J]. 电子通信与计算机科学, 2024, 6(4):142-144.

YU F Y, CHANG H, XING C, et al. Research on compensation technology for temperature coefficient of scale factor in quartz flexible accelerometer[J]. Electronics,Communications and Computer Science, 2024, 6(4):142-144.

[6]
LEE K,TAKAO H and Sawada K. A three-axis accelerometer for high temperatures with low temperature dependence using a constant temperature control of SOI piezo resistors[C]// Proceedings of the Sixteenth Annual International Conference on Micro Electro Mechanical Systems.Kyoto, Japan:IEEE,2003:478-481.

[7]
麻彩霞, 于瑞航, 曹聚亮, 等. 捷联式重力仪加速度计非线性误差参数模观测标定方法[C]// 中国自动化学会.2023中国自动化大会论文集. 长沙: 国防科技大学,2023:113-119.

MA C X, YU R H, CAO J L, et al. Model observation calibration method for accelerometer nonlinear error parameters in strapdown gravimeter[C]// Proceedings of 2023 Chinese Automation Congress. Changsha: National University of Defense Technology,2023:113-119.

[8]
许哲, 徐啸, 韩志强, 等. 石英挠性加速度计力矩器仿真建模与优化设计[J]. 中国惯性技术学报, 2024, 32(5):492-498.

XU Z, XU X, HAN Z Q, et al. Simulation modeling and optimization design of torquer for quartz flexible accelerometer[J]. Journal of Chinese Inertial Technology, 2024, 32(5):492-498.

[9]
WANG C, LI X, KOU K, et al. Optimization of magnetic hat for quartz flexible accelerometer[J]. Sensor Review, 2016, 36(1):71-76.

DOI

[10]
董鑫宇, 焦舰, 陆伟亮, 等. 石英挠性加速度计阻尼参数闭环检测方法[J]. 飞控与探测, 2023, 6(4):95-99.

DONG X Y, JIAO J, LU W L, et al. Closed-loop detection method for damping parameters of quartz flexible accelerometer[J]. Flight Control & Detection, 2023, 6(4):95-99.

[11]
郝宇超, 刘洪, 张佳悦, 等. 石英挠性加速度计摆片特性仿真研究[J]. 传感器与微系统, 2024, 43(11):25-27,32.

HAO Y C, LIU H, ZHANG J Y, et al. Simulation study on the characteristics of pendulum piece in quartz flexible accelerometer[J]. Transducer and Microsystem Technology, 2024, 43(11):25-27,32.

[12]
崔粲, 聂鲁燕, 李立勇, 等. 石英挠性加速度计温度稳定性改进设计[J]. 中国惯性技术学报, 2022, 30(5):658-665,673.

CUI C, NIE L Y, LI L Y, et al. Improved design of temperature stability for quartz flexible accelerometer[J]. Journal of Chinese Inertial Technology, 2022, 30(5):658-665,673.

[13]
杨峰, 王勇, 彭志高, 等. 石英挠性加速度计磁路参数研究[J]. 压电与声光, 2020, 42 (1):123-126.

YANG F, WANG Y, PENG Z G, et al. Research on magnetic circuit parameters of quartz flexible accelerometer[J]. Piezoelectrics & Acoustooptics, 2020, 42(1):123-126.

[14]
张心悦, 马官营, 刘吉利, 等. 基于静电力平衡的石英挠性加速度计[J]. 空间控制技术与应用, 2019, 49(5):29-36.

ZHANG X Y, MA G Y, LIU J L, et al. Quartz flexible accelerometer based on electrostatic force balance[J]. Aerospace Control and Application, 2019, 45(5):29-36.

[15]
俞茂超, 王新宇, 阳洪, 等. 石英挠性加速度计温度补偿方法研究[J]. 压电与声光, 2018, 40 (2):220-222.

YU M C, WANG X Y, YANG H, et al. Research on temperature compensation method for quartz flexible accelerometer[J]. Piezoelectrics & Acoustooptics, 2018, 40(2):220-222.

[16]
刚煜, 王永建, 赵鹏, 等. 石英挠性加速度计表头力矩器噪声模型研究[J]. 传感器与微系统, 2018, 37(3):34-37.

GANG Y, WANG Y J, ZHAO P, et al. Research on noise model of torque in quartz flexure accelerometer[J]. Transducer and Microsystem Technology, 2018, 37(3):34-37.

[17]
田兴, 李天赐, 李海兵, 等. 超高分辨率石英挠性加速度计设计研究[J]. 新技术新工艺, 2020 (4):21-25.

TIAN X, LI T C, LI H B, et al. Design and research of ultra-high resolution quartz flexible accelerometer[J]. New Technology & New Process, 2020(4):21-25.

[18]
朱红生, 王巍. 大量程石英挠性加速度计结构设计与研究[J]. 导航与控制, 2005, 4(2),40-46.

ZHU H S, WANG W. Structural design and research of wide-range quartz flexible accelerometer[J]. Navigation and Control, 2005, 4(2),40-46.

[19]
史有志, 冯仁剑, 李晓婷. 基于PSO-BP的石英挠性加速度计静态模型辨识[J]. 计测技术, 2025, 45 (3):78-84.

SHI Y Z, FENG R J, LI X T. Static model identification of quartz flexible accelerometer based on PSO-BP[J]. Metrology & Measurement Technology, 2025, 45(3):78-84.

[20]
李蓉, 赵文胜, 邓权明, 等. 基于杠杆制造误差的MEMS谐振加速度计非线性研究[J]. 仪表技术与传感器, 2025 (3):11-14,19.

LI R, ZHAO W S, DENG Q M, et al. Research on nonlinearity of MEMS resonant accelerometer based on lever manufacturing rrror[J]. Instrument Technique and Sensor, 2025(3):11-14,19.

[21]
沃尔克·肯普. 惯性MEMS器件原理与实践[M]. 北京: 国防工业出版社,2016:271-274.

VOLKER K. Inertial MEMS principles and practice[M]. Beijing: National Defence Industry Press,2016:271-274.

[22]
GJB 1037A-2004. 单轴摆式伺服线加速度计试验方法[S]. 北京. 国防科学技术工业委员会,2004:9.

GJB 1037A-2004. Test methods for single-axis pendulous servo linear accelerometers[S]. Beijing: Commission for Science, Technology and Industry for National Defense,2004:9.

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