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Journal of Projectiles, Rockets, Missiles and Guidance >

2024 , Vol. 44 >Issue 5: 63 - 74

DOI: https://doi.org/10.15892/j.cnki.djzdxb.2024.05.008

Research on the Temperature Control System of Micro-optical Accelerometers Based on Fuzzy PID

  • YU Xinlong 1 ,
  • CHEN Jiaxiao 2 ,
  • YAN Wenhui 3 ,
  • WU Shuang 3 ,
  • LU Qianbo 1
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  • 1 Institute of Flexible Electronics,Northwestern Polytechnical University, Xi’an 710129,Shaanxi,China
  • 2 College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China
  • 3 School of Automation, Northwestern Polytechnical University, Xi’an 710129,Shaanxi,China

Received date: 2023-08-03

  Online published: 2024-12-18

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Abstract

Micro-accelerometers are widely utilized in fields such as inertial navigation due to their compact size and high measurement accuracy. MOEMS (micro-opto-electro-mechanical system) accelerometers, based on optical measurement principles, offer enhanced measurement accuracy and are less susceptible to electromagnetic interference, making them highly promising for future development. However, external environmental changes, particularly fluctuations in temperature, can adversely affect the performance of micro-accelerometers. High-precision micro-optical accelerometers are especially sensitive to temperature variations due to their optical cavity length, which can lead to a decrease in detection accuracy. Therefore, improving temperature stability is crucial. Temperature control is the most effective method to mitigate the thermal effects on micro-optical accelerometer chips. This paper proposes a closed-loop temperature control scheme based on genetic algorithms and fuzzy PID (proportional-integral-derivative) control for a sandwich-structured chip-level packaged MOEMS accelerometer. The work involves designing a temperature control circuit, with a microcontroller serving as the main control unit, determining the controlled object model, then identifying the transfer function as well as tunning and debugging the system's temperature control parameters. The sandwich-type micro-optical accelerometer packaging structure studied in this paper provides favorable conditions for temperature control. The temperature control scheme with PID control parameters optimizes based on fuzzy logic and genetic algorithms exhibits excellent control performance and shorter regulation time. Theoretically, it significantly reduces the temperature control error by several orders of magnitude, effectively minimizing the thermal effects on high-precision micro-optical accelerometer chips. This temperature control scheme also demonstrates strong robustness, making it practically applicable to other micro-sensors with small, semi-enclosed structures.

Key words： MOEMS accelerometer; temperature control; fuzzy PID control; genetic algorithm

Cite this article

YU Xinlong , CHEN Jiaxiao , YAN Wenhui , WU Shuang , LU Qianbo . Research on the Temperature Control System of Micro-optical Accelerometers Based on Fuzzy PID[J]. Journal of Projectiles, Rockets, Missiles and Guidance, 2024 , 44(5) : 63 -74 . DOI: 10.15892/j.cnki.djzdxb.2024.05.008

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References

Publishing order | Descend order by publishing year | Descend order by cited within
[1]
张攀峰. 光学高精度微加速度计的位移测量系统研究[D]. 杭州: 浙江大学, 2006.

ZHANG P F. Research on the displacement measurement system of optical high-precision micro-accelerometers[D]. Hangzhou: Zhejiang University, 2006.

[2]
SANKAR A R, DAS S. A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass[J]. Sensors and Actuators A: Physical, 2013, 189: 125-133.

[3]
王晨. 高灵敏度MEMS加速度计亚波长光栅及柔性梁的设计与优化[D]. 杭州: 浙江大学, 2018.

WANG C. Design and optimization of subwavelength gratings and flexible beams for high-sensitivity MEMS accelerometers[D]. Hangzhou: Zhejiang University, 2018.

[4]
赵双双. 微光学集成的高精度MOEMS加速度传感器研究[D]. 杭州: 浙江大学, 2013.

ZHAO S S. Research on high-precision MOEMS accelerometers with micro-optical integration[D]. Hangzhou: Zhejiang University, 2013.

[5]
LU Q, WANG Y, WANG X, et al. Review of micromachined optical accelerometers: from mg to sub-μg[J]. Opto-electronic Advances, 2021, 4(3): 200045.

[6]
ZHAO S, ZHANG J, HOU C, et al. Optical accelerometer based on grating interferometer with phase modulation technique[J]. Applied Optics, 2012, 51(29): 7005-7010.

[7]
LU Q, BAI J, WANG K, et al. Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer[J]. Journal of Microelectromechanical systems, 2017, 26(4): 859-869.

[8]
韩丹丹. 高精度微光学加速度计的温度特性研究[D]. 杭州: 浙江大学, 2018.

Han D D. Research on the temperature characteristics of high-precision micro-optical accelerometers[D]. Hangzhou: Zhejiang University, 2018.

[9]
闻邦椿, 刘树英, 张纯宇. 机械振动学: 第2版[M]. 北京: 冶金工业出版社, 2011.

WEN B C, LIU S Y, ZHANG C Y. Mechanical vibration: 2nd ed[M]. Beijing: Metallurgical Industry Press, 2011.

[10]
CORIGLIANO A, ARDITO R, COMI C, et al. Mechanics of microsystems[M]. New York: John Wiley & Sons Inc., 2017.

[11]
KWIAT P G, VAREKA W A, HONG C K, et al. Correlated two-photon interference in a dual-beam Michelson interferometer[J]. Physical Review, 1990, 41: 2910.

[12]
FANG W, WANG C, BAI J, et al. Investigation of the thermal deformation of a chip-scale packaged optical accelerometer[J]. Measurement, 2020, 163: 108017.

[13]
JHA C M, HOPCROFT M A, CHANDORKAR S A, et al. Thermal isolation of encapsulated MEMS resonators[J]. Journal of Micro-Electromechanical Systems, 2008, 17(1): 175-184.

[14]
VERMA B, PADHY P K. Robust fine tuning of optimal PID controller with guaranteed robustness[J]. IEEE Transactions on Industrial Electronics, 2019, 67(6): 4911-4920.

[15]
ZADEH L A. Outline of a new approach to the analysis of complex systems and decision processes[J]. IEEE Transactions on systems, Man, and Cybernetics, 1973(1): 28-44.

[16]
BORASE R P, MAGHAD D K, SONDKAR S Y, et al. A review of PID control, tuning methods and applications[J]. International Journal of Dynamics and Control, 2021, 9: 818-827.

[17]
VAN M, DO X P, MAVROVOUNIOTIS M. Self-tuning fuzzy PID-nonsingular fast terminal sliding mode control for robust fault tolerant control of robot manipulators[J]. ISA Transactions, 2020, 96: 60-68.

DOI PMID

[18]
CUELLAR A J, TRONCOSO R J, VELAZQUEZ L M, et al. PID-controller tuning optimization with genetic algorithms in servo systems[J]. International Journal of Advanced Robotic Systems, 2013, 10: 324-334.

[19]
KOZENY V. Genetic algorithms for credit scoring: alternative fitness function performance comparison[J]. Expert Systems with Applications, 2015, 42(6): 2998-3004.

[20]
LAMBORA A, GUPTA K, CHOPRA K. Genetic algorithm-a literature review[C]// IEEE.Proceedings of the 2019 International Conference on Machine Learning, Big Data, Cloud and Parallel Computing. New York: IEEE, 2019:8862255.

[21]
SHREIDER Y A, TEE G J, HENNEY A G. The Monte Carlo method: the method of statistical trials[J]. Physics Today, 1967, 20(1): 129-135.

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