In order to improve the tracking accuracy of electro-optical servo system for meeting the need of modern aviation and aerospace, based on the principle of speed delay compensation and acceleration lag compensation, a position ahead inhibition method for fast moving target was proposed. Then the effect of position a head inhibition parameters on servo system's tracking accuracy were analyzed, and the principle of parameter selection was determined. In the electro-optical tracing servo system simulation experiment, combined with the feedforward internal model control technology, the tracing error was greatly reduced, and the tracking accuracy was effectively improved.